Put it in the oven at 150 degrees for 20 minutes.
Normally, you might be able to use a hairdryer, or any other number of methods to dry it out, but if you want to make sure and you want to make sure right now, put it in the oven.
I have two sets of atomizers that I rotate every week now. And the only reason I do this is because I give them a Coke bath once a week and want them to dry for at least a day.
I have definitely found they really need to dry a LOT before they will work well again.